Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.

Contact Information

108 Cherry Hill Drive
Beverly, MA 01915

tel: 978-787-4000
fax: 978-232-4200


Investor Relations



Exchange: NASDAQ
Industry: Semiconductor Equipment & Materials
Market Cap: $573.7M

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